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超高真空双倾角室蒸发设夆�/strong>

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1、UHV超高真空腔体�?腔室，负荷锁和蒸发，负荷锁极限真�?nbsp;极限压力<1E-8 Torr，可加热RT-900ºC

2、蒸发腔：极限真�?nbsp;极限压力<3e-9 Torr

3、高分辨率镀膜速率显示及控� ：�?.015，�?00mm镀膜均一�?lt;3%

4、基板操控能力：可实�?80度倾斜�?60度旋转，0.1度的精准控制，加热RT-600ºC

5、传� ：全自动样品传输

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