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双腔室UHV磁控溅射镀膜系绞�/div>

型号
QBT-P
产地
福建
品牌
韫茂科技
产品分类
实验设备
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参考报件�/p>

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双腔室超高真空双磁控测射系统 QBT-P

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磁控溅射技术原琅�/span>

在阴�?/span>靶的表面上方形成一个正交电磁场。当溅射产生的二次电子在阴极位降区内被加速为高能电子后，并不直接飞向阳极，而是在正交电磁场作用下作来回振荡的近似摆纾�/span>的运动。高能电子不断与气体分子发生碰撞并向后者转移能量，使之电离而本身变成低能电子。这些低能电�?终沿磁力线漂移到阴极附近的辅助阳极而被吸收，避免高能电子对极板的强烈轰击，消除了二�?/span>溅射中极板被轰击加热和被电子辐照引起的损伤，体现出磁控溅射中极板“低温”的特点。由于外加磁场的存在，电子的复杂运动增加了电离率，实现了高速溅射、�/span>

磁控溅射技术特炸�/span>

成膜速率高，基片温度低，膜的粘附性好，可实现大面�?/span>镀膛�/span>

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技术参�?/span>

QBT-P 技术参� Technical Specifications （超导Ta/TiN/NbN/Al/Nb等制备）
超高真空腔体 UHV Chamber	2个UHV Chamber,包括Loadlock及Sputtering, 极限真空Ultimate Pressure<3E-9Torr
排气速率Pumping Spead	从ATM�?E-7Torr<20min (loadlock)
基板加热 Wafer Heating	RT-900oC
离子束清� Ion Milling	考夫曼离子源, Ion Energy 100-600eV, 100-1200eV; Ion Beam Current:20-200mA, Ф100基板刻蚀均一�?lt;3%
磁控溅射Sputtering	DC or RF Power Supply, 基板与靶材距离连续可调Wafer and Target Space can Change Continoulsly
基板传输 Wafer Transfer	高度可靠和可重复的基板传输能劚�/td>
人机界面 HMI	全自动化人机操作界面
安全Safety	工业标准安全互锁Industry Safety Interlock，报警Alarm，EMO

工艺展示

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