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高真空磁控溅射系绞�/div>

型号
PVD-100
产地
福建
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韫茂科技
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实验设备
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高真空磁控溅射系绞�/span>

技术参数：

1高真空腔体：2个腔�?包括负荷锁及Sputtering,极限真空，极限压�?lt;5e-9 Torr

2排气速率：从ATM�?E-7 Torr<20分钟(负载�?

3样品台：**4寸Wafer，可加热RT-300ºC

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