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等离子增强系绞�/span>
产地
深圳
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原速光甴�/span>
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设备规格

衬底尺寸：标准尺寸：200mm Dia (8 inch）（可定�?
工艺温度：温度范围：RT~500°C （可定制（�br/>前驱体路数：**支持6路前驱体气路（可定制)，包含固、液态前驱体源瓶

加热系统：可加热温度范围：RT~150ℂ�/p>

反应物路数：支持2路反应物气路（可定制（�br/>载气：标准：N2, MFC 流量控制（可定制（�/p>

等离子体系统：支�?路等离子体气体（可定制）

射频功率�?~1000W
压力监测：双薄膜规组合（耐腐蚀)�?.005Torr - 1000Torr
本底真空度：<5x10-3 Torr
真空系统：标准油泴�/p>

控制系统�?9寸显示器，支持触控工业级嵌入式工控机，高可靠性，支持扩展
操作系统：Win7 操作系统，工业级可编程逻辑控制器，支持现场总线与实时多任务处理操作

高温加热模块：独立的源瓶加热模块，可支持RT~200ℂ�/p>

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