多面扫描镛/span>(Polygonal Scanners)，可实现大范围、高精度、超高速、高重复性的激光光束扫描。相比振镜扫描，多面扫描镜具有更快的扫描速度且具有更高的损伤阈值、/span>
多面扫描镛/span>(Polygonal Scanners)系统９/span>提供不同扫描宽度，不同工作波长和聚焦光斑尺寸，可满足您对再现性和准确性的要求、/span>
集成的远心平面镜片实现了紧凑型一体化即用型的扫描头，可以实现高性能及高效率的微加工要求、/span>
备有通用型的控制器，易集成于线性平台和卷式行业标准运动控制系统中。系统接口可以兼容传统激光和脉冲激光。另外，模块化的设计可以按照客户需求进行快速定制、/span>
所有扫描头都配备通用接口，控制器通过以太网控制、/span>能多面扫描镜系统
High Performance Polygon Scanner Systems
规格参数９/span>
Optical specifications光学规格 |
Standard标准规格 |
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Scan width扫描宽度 |
300 mm |
170 mm |
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Wavelength波长(nm) |
355-375 |
515-532 |
1030-1070 |
|
Minimum Spot*小光斑尺寷/span>(FWHM)1 |
9 m |
13 m |
26 m |
|
Minimum Spot*小光斑尺寷/span>(1/e2 dia) |
15 m |
22 m |
44 m |
|
Input beam diameter(1/e2 dia) 输入光斑直径(1/e2 dia) |
11 mm |
6 mm |
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Input clear aperture输入数值孔徃/span> |
19 mm |
10 mm |
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Position Accuracy定位精度 |
10 m or 1 m 2 |
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Line straightness线平直度 |
15 m or 1 m 2 |
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Spot repeatability光斑重复?/span> |
< 3 m 3 |
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System specifications系统规格 |
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Input beam输入光斑 |
Parallel beam |
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Scan speed扫描速度 |
56 224 lines per second |
100 400 lines per second |
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Moving spot speed光斑移动速度 |
25 100 meters per second |
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Scanner mechanical efficiency 扫描头机械效率效玆/span> |
71 % |
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Optical efficiency光学效率 |
> 85 % GR/IR |
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Average Laser power 1平均激光功玆/span> |
140 W (>7 ps) 50W (200 fs) |
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Minimum pulse width*小脉冲宽?/span> |
> 200 fs |
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Maximum pulse energy*小脉冲能野/span> |
150 J (ps) 50 J (fs) |
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Mechanical interface机械接口 |
Industry standard interface |
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Scanner to substrate clearance 扫描头到基板距离 |
26.5 mm |
18 mm |
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Power consumption功率 |
125 W max. |
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Electrical supply电源 |
Mono + earth 50/60 Hz 100-240 VAC |
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PC Connection电脑链接 |
Ethernet TCP/IP protocol and USB3 |
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Cable Length连线长度 |
Max. 5 meter between scanner unit and control electronics |
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手机粉体罐/p>
发求
发供
