适用工件９/p> (Applicable parts) |
6?8寸蓝宝石或碳化硅 6"/8“Sapphire or SiC Wafer |
| 批量产能９br style="box-sizing: border-box;"/>(Capacity) | 60s/pcs |
工艺流程９/p> (Procedure Flow) |
上料 晶圆定位→旋转刷洗及二流体喷?硅面)→翻?80度→旋转刷洗、兆声波喷洗(碳面)→旋转甩干→下料 Load→Location→Rotation,brushing,cleaning,two-fluid spraying(Si side)→Turn over 180 degree→Rotation, brushing,cleaning,megasonic spraying(C side)→Rotation, Spin-Drying→Unload |
| 主要材料９br style="box-sizing: border-box;"/>(Major Material) | 金属骨架+PP瓷白壳板 Metal Frame+PP white board |
| 运送方式： (Transportation) |
通过洁净机械手进行晶圆传辒br style="box-sizing: border-box;"/>Wafer transported by clean robotic hand |
工艺效果９/p> (Process effect) |
a.particle size0.3~0.5um,remove %>90%or <200e.a; b.particle size0.5~1um,remove%>95%or <10e.a、/p> PS:inspection machine is for Candela or SICA |
手机粉体罐/p>
发求
发供
