Y2O3热喷涂粉体_有研稀土新材料股份有限公司_供应信息_采购中心_中国粉体罐�/title>

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Y2O3热喷涂粉佒�/div>

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Y2O3热喷涂粉佒�/span>
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北京
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有研稀圞�/span>
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其它无机材料
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用于半导体工业晶圆加工设备的耐等离子体刻蚀材料，可以避免等离子刻蚀过程中高能含氟等离子体对腔体内各部件的侵蚀，也可以避免刻蚀过程中生成的难挥发氟化物沉积在晶圆表面，增加部件的使用寿命，减少晶圆的污染。有研稀土可以根据客户需求提供多种粒度的Y2O3高纯造粒粉体、�/span>

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