1.方块电阻

10^-5�?×10^5Ω/■�/span>

10^-6�?×10^5Ω/■�/span>

2.电阻�

10^-6�?×10^6Ω-cm

10-7�?×106Ω-cm

3.测试电流

0.1μA;1μA;10μA�?00µA�?mA＋�/span>

10mA�?00mA

1A�?00mA�?0mA�?mA�?00uA�?0uA�?uA�?.1uA

4.电阻精度

�?.3%（标准电阻）

5.PC软件操作

PC软件界面：电阻、电阻率、电导率、方阻、温度、单位换算、电流、电压、探针形状、探针间距、厚� �?/span>2D�?D图谱、报表生戏�/span>筈�/span>

6.压力范围

探针压力可调范围９�/span>100-500g

7.採�/span>钇�/span>

钨钢材质，探针间跜�/span>1mm：�/span>机械游移率：�?.3%：�/span>其他规格可定刵�/span>

8.载台类型及尺寷�/span>选购

选购1:圆形载台晶圆尺寸９�/span>2-12寷�/span>＇�/span>6寷�/span>150mm＋�/span>12寷�/span>300mm（�/span>

选购2９�/span>方片载台尺寸９�/span>153mm*153mm范围内定制规栻�/span>

9.分析模式

单点、五点、九点、多点、直径扫描、面扫描等模式的自动测试

10.重复�?/span>

单点重复性：重复�?/span>≣�/span>0.5%

11.防护功能

具有限位量程和压力保抣�/span>;误操作和急停防护;异常警报

12.电源

输入: AC 220V±10%.50Hz＋�/span>办�/span>耗：<600W