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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <h3 class="panel-title" style="box-sizing: border-box; font-family: inherit; font-weight: 500; line-height: 1.1; color: inherit; margin-top: 0px; margin-bottom: 0px; font-size: 16px;">PECVD镀膜设夆�br style="box-sizing: border-box;"/></h3><p style="box-sizing: border-box; margin: 0px 0px 10px;"> PEVCD(等离子增强化学气相沉�?*重要的应用之一是沉积微电子器件用绝缘薄膜，在低温下沉积氮化硅、氧化硅或硅的氮氧化物一类的绝缘薄膜，这对于超大规模集成芯片的生产是至关重要的。PECVD的一个重要优点是能在比热CVD更低的温度下沉积。PECVD技术在250�?00度的温度范围内使氮化硅薄膜的沉积成为可能。PECVD沉积SiO2绝缘层被广泛地应用于半导体器件工艺，*近在光学纤维的涂层和某些装饰性涂层方面获得了应用。近年来，PECVD在摩擦磨损、腐蚀防护和切削工具涂层应用方面获得了很大进展、�/p><p><br class="Apple-interchange-newline"/></p><table class="ke-zeroborder" cellspacing="0" cellpadding="0" bgcolor="#FFFFFF" width="100%"><tbody style="box-sizing: border-box;"><tr style="box-sizing: border-box;" class="firstRow"><td style="box-sizing: border-box; padding: 0px;" align="center" width="40%"><img alt="" src="https://img1.cnpowder.com.cn/img/daily/2018/06/05/101445_458487_procont.jpg" style="box-sizing: border-box; border: 0px; vertical-align: middle;" height="133" width="200"/></td><td style="box-sizing: border-box; padding: 0px;" align="left" width="60%"><strong style="box-sizing: border-box; font-weight: 700;">PECVD设备可制备的薄膜</strong><br style="box-sizing: border-box;"/><br style="box-sizing: border-box;"/><ul style="box-sizing: border-box; margin-top: 0px; margin-bottom: 10px;" class=" list-paddingleft-2"><li><p>SiNx</p></li><li><p>SiO2</p></li><li><p>α-Si</p></li><li><p>Poly-Si</p></li><li><p>GaAs膛�/p></li><li><p>Si:H膛�/p></li><li><p>SiC膛�/p></li><li><p>DLC多晶硄�/p></li></ul>广泛应用于微电子和光电子领域科研和生产、�/td></tr><tr style="box-sizing: border-box;"><td style="box-sizing: border-box; padding: 0px;" align="center" width="40%"><img alt="" src="https://img1.cnpowder.com.cn/img/daily/2018/06/05/101445_558300_procont.jpg" style="box-sizing: border-box; border: 0px; vertical-align: middle;" height="197" width="200"/></td><td style="box-sizing: border-box; padding: 0px;" align="left" width="60%"><strong style="box-sizing: border-box; font-weight: 700;">PECVD沉积设备参数</strong><br style="box-sizing: border-box;"/><br style="box-sizing: border-box;"/><ul style="box-sizing: border-box; margin-top: 0px; margin-bottom: 10px;" class=" list-paddingleft-2"><li><p>特殊的平板式φ200*H150反应宣�/p></li><li><p>系统极限真空1*10-5Pa</p></li><li><p>带加热和气浴喷淋系统</p></li><li><p>电源�?3.56M Hz*300W / 40K Hz*600W / 双电溏�/p></li><li><p>数字定时器，精度1科�/p></li><li><p>数字温度控制系统</p></li><li><p>工艺程序自动匕�/p></li><li><p>触摸屏控制、动画实时显示工艺过程的状况和提礹�/p></li><li><p>质量流量�?个；气路4� ( 可增� )、�/p></li><li><p>样品加热�?0�?00℃，控温精度：≤ ±1ℂ�/p></li><li><p>强制循环水冷</p></li></ul></td></tr><tr style="box-sizing: border-box;"><td style="box-sizing: border-box; padding: 0px; color: rgb(51, 51, 51); font-family: 'Helvetica Neue', Helvetica, 'Microsoft Yahei', 'Hiragino Sans GB', 'WenQuanYi Micro Hei', sans-serif; font-size: 14px; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: 20px; orphans: auto; text-indent: 0px; text-transform: none; white-space: normal; widows: 1; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255);" align="center" height="100" width="40%"><br/></td><td style="box-sizing: border-box; padding: 0px; color: rgb(51, 51, 51); font-family: 'Helvetica Neue', Helvetica, 'Microsoft Yahei', 'Hiragino Sans GB', 'WenQuanYi Micro Hei', sans-serif; font-size: 14px; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: 20px; orphans: auto; text-indent: 0px; text-transform: none; white-space: normal; widows: 1; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255);" align="center" height="100" width="40%"><br/></td></tr></tbody></table><p><br/></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); 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