韫茂科技双倾角约瑟夫森结制备系�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p style="text-align: center;"><strong><span style="font-size: 20px; font-family: arial, helvetica, sans-serif;"></span></strong></p><p style="clear: both;"><strong><span style="font-size: 20px; color: rgb(31, 73, 125);">全自动四腔超高真空双倾角镀膜系�?nbsp; QBT-J </span></strong></p><p style="clear: both;"><span style="margin: 0px; padding: 0px; font-family: -apple-system, BlinkMacSystemFont, "SF Pro SC", "SF Pro Text", "Helvetica Neue", Helvetica, "PingFang SC", "Segoe UI", Roboto, "Hiragino Sans GB", arial, "microsoft yahei ui", "Microsoft YaHei", SimSun, sans-serif; color: rgb(31, 73, 125); font-size: 20px;"></span></p><p style="clear: both; text-align: center;"><img src="//www.znpla.com/img1/img/daily/2023/01/12/105328_698337_procont.jpg" title="四腔�?jpg" alt="四腔�?jpg" width="435" height="435" style="color: rgb(89, 89, 89); font-family: 微软雅黑, "Microsoft YaHei"; text-align: center; white-space: normal; width: 435px; height: 435px;"/></p><p style="clear: both; font-size: 12px; white-space: normal; background-color: rgb(255, 255, 255);"><span style="color: rgb(31, 73, 125);"><strong><span style="font-family: arial, helvetica, sans-serif; font-size: 18px;">约瑟夫森结超高压系统</span></strong></span></p><p style="clear: both; font-size: 12px; white-space: normal; background-color: rgb(255, 255, 255);"><span style="color: rgb(31, 73, 125);"><strong><span style="font-family: arial, helvetica, sans-serif; font-size: 18px;"><br/></span></strong></span></p><span style="font-family: 宋体; color: rgb(0, 0, 0); font-size: 18px;"> 全自动四腔超高真空双倾角镀膜系统专专业制备约瑟夫森结制备，可精确生长所需的金属层和氧化绝缘层，确保高性能制备及高成品率；此镀膜仪有进样室、氩离子清洗室、电子束� 发室以及氧化室，共计四个高真空腔室，腔室间使用传样杆进行高真空传样，传递模组须采用抓取式设计；设备所有工艺均支持4英寸及以内的晶圆或不规则样品。设备整个工艺过程，可以完全按照用户设置的参数自动化运行，工艺流程包括并不限于：抽真空，监测气压，离子清洗，样品位置调节、传样，加热，电子束蒸发� 定厚度设置，自动调整气压等、�/span><p style="clear: both; font-size: 12px; white-space: normal; background-color: rgb(255, 255, 255);"><span style="font-family: arial, helvetica, sans-serif; font-size: 16px;"></span></p><p style="clear: both; font-size: 12px; white-space: normal; background-color: rgb(255, 255, 255);"><span style="font-family: arial, helvetica, sans-serif; font-size: 16px;"><br/></span></p><p style="clear: both; text-align: center;"><span style="font-family: arial, helvetica, sans-serif;"><img src="//www.znpla.com/img1/img/daily/2023/01/12/105221_120641_procont.jpg" title="微信图片_20220224094931.jpg" alt="微信图片_20220224094931.jpg" width="456" height="252"/></span></p><p style="clear: both; font-size: 12px; white-space: normal; background-color: rgb(255, 255, 255);"><span style="color: rgb(31, 73, 125);"><strong><span style="font-family: arial, helvetica, sans-serif; font-size: 18px;">技术参�?/span></strong></span></p><p style="clear: both; font-size: 12px; white-space: normal; background-color: rgb(255, 255, 255);"><br/></p><table width="688" style="width: 668px;"><tbody style="padding: 0px; margin: 0px;"><tr class="firstRow" style="padding: 0px; margin: 0px; background-color: rgb(242, 242, 242);"><td colspan="2" style="padding: 8px; margin: 0px; line-height: 1.42857; font-weight: bold; font-size: 18px; vertical-align: middle !important;">QBT-J 技术参� Technical Specifications (双倾角约瑟夫森结制备）</td></tr><tr style="padding: 0px; margin: 0px;"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">超高真空腔体 UHV Chamber</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">4个UHV Chamber,包括Loadlock/Aneal, Ion Milling, Ebeam-Evaporation, Oxidation, 极限真空Ultimate Pressure<1E-9Torr</td></tr><tr style="padding: 0px; margin: 0px; background-color: rgb(242, 242, 242);"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">基板加热 Wafer Heating</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">RT-900ℂ�/td></tr><tr style="padding: 0px; margin: 0px;"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">离子束清� Ion Milling</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">考夫曼离子源, Ion Energy 100-600eV, 100-1200eV, Ion Beam Current:20-200mA, Ф100基板刻蚀均一�?lt;3%</td></tr><tr style="padding: 0px; margin: 0px; background-color: rgb(242, 242, 242);"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">电子束蒸� Ebeam Evaporation</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">UHV 5 Linear Pocket Ebeam Evaporation Source, 8KW Power Supply</td></tr><tr style="padding: 0px; margin: 0px;"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">氧化 Oxidation</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">Flow and Static Mode Oxidation</td></tr><tr style="padding: 0px; margin: 0px; background-color: rgb(242, 242, 242);"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">基板操控能力 Wafer Tilt and Rotation</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">可实�?80度倾斜�?60度旋转，0.1度的精准控制</td></tr><tr style="padding: 0px; margin: 0px;"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">基板传输 Wafer Transfer</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">高度可靠和可重复的基板传输能劚�/td></tr><tr style="padding: 0px; margin: 0px; background-color: rgb(242, 242, 242);"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">人机界面 HMI</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">全自动化人机操作界面</td></tr><tr style="padding: 0px; margin: 0px; background-color: rgb(233, 233, 233);"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">安全Safety</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">工业标准安全互锁Industry Safety Interlock，报警Alarm，EMO</td></tr></tbody></table><p style="clear: both;"><br style="color: rgb(89, 89, 89); font-family: 微软雅黑, "Microsoft YaHei"; white-space: normal;"/></p><p style="text-align: center;"><span style="font-family: arial, helvetica, sans-serif; font-size: 16px;"></span><br/></p><table height="409" width="600"><tbody style="margin: 0px; padding: 0px; box-sizing: border-box; animation-fill-mode: both;"><tr height="24" style="margin: 0px; padding: 0px; box-sizing: border-box; animation-fill-mode: both; height: 18pt;" class="firstRow"><td class="et6" x:str="" style="margin: 0px; padding: 1px 1px 0px; box-sizing: border-box; animation-fill-mode: both; border-width: medium; border-style: none; border-color: initial; vertical-align: middle; white-space: nowrap;"><br/></td></tr></tbody></table><p><span style="font-family: 微软雅黑, Arial; background-color: rgb(255, 255, 255);"></span></p><p><br/><br/></p><table height="409" width="600"><tbody style="margin: 0px; padding: 0px; box-sizing: border-box; animation-fill-mode: both;"><tr height="24" style="margin: 0px; padding: 0px; box-sizing: border-box; animation-fill-mode: both; height: 18pt;" class="firstRow"><td class="et6" x:str="" style="margin: 0px; padding: 1px 1px 0px; box-sizing: border-box; animation-fill-mode: both; border-width: medium; border-style: none; border-color: initial; vertical-align: middle; white-space: nowrap;"><br/></td></tr></tbody></table><p><span style="font-family: 微软雅黑, Arial; background-color: rgb(255, 255, 255);"></span><br/></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 约瑟夫森结超高压系统：超高真空设计，真空互联传输平台，专为量子计算、超导应用而生� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); 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