The X-Prep? fixture adapter is also secured to the motorized stage on theX-Prep? Vision?� ensuring the measurement/tool control coordinates remain aligned when transferred between systems.

A library with over 130 materials (i.e.� GaAs� InGaAs� SiC� Sapphire/Al2O3� InP� SiGe� GaN� photo-resist) is included with every system.

Meaurement & Observation - How it Works

IR light is focused onto a sample� and a unique signal based on the refractive index of the material is created. The return signal is analyzed by the software to produce a thickness value.

Meauring Below 10 ��m Thickness

For applications requiring thinning to less than 10 ��m� precise measurement is possible only by adding the visible light spectrometer accessory.

FEATURES