Technical Data:

技术参数：

Shape:Horizontal design.

外形９�/span>水平设计

Chamber dimensions:? = 1�? m� Length = 3�? m.

腔体尺寸９�/span>? = 1�? m� Length = 3�? m.

Vacuum better than:1x10-5mbar.

真空度：<1x10-5mbar.

Temperature range:from �?5oC to +120oC.

温度范围９�/span>�?5oC to +120oC

Heating/Cooling speed at the shrouds:1oC/min.

导热层加热冷却速率９�/span>1oC/min.

Shroud temperature uniformity:2oC.

导热层温度均匀�?/span>９�/span>2oC

Working surface:optical table.

工作台面：光学桌孏�/span>

特殊设计９�/span>

Table supported on a seismic block� isolated from chamber supports.

工作桌面区别于腔体，单独固定在一个防震区块上、�/span>

4 shroud zones with independent temperature control.

四个区域拥有单独的温度控制模块、�/span>

TCU and vacuum pumps are in separated machinery room.

温度控制模块和真空泵在不同的房间