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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p>MIDAS SYSTEM公司开发并生产用于半导体、MEMS、LED及纳米技术相关的实验室和工业领域的光罩对准曝光机和甩胶机，是韩国**家研发并商业化光罩对准曝光机的企业，始终致力于不断完善、增强技术型企业的核心竞争力、�/p><p>MIDAS SYSTEM公司具有专业化的设计团队，以客户需要为己任，生产、供应满足国内外企业、科研院所不断增长的应用需求，并且提供半导体工艺相关的设备需要、�/p><p>MDA-12SA型曝光机是一款MIDAS公司新开发的产品，代表了下一代全区域光刻系统。这一新型半自动化对准曝光平台具有更高的重复光刻精度以及更可靠的操作，非常适合陶瓷及其他探针卡应用，同时MDA-12SA型半动化光罩对准曝光机具有更高的生产能力和容易操控、�/p><table align="center" cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td>项目</td><td>参数</td></tr><tr><td>光源能量</td><td>紫外曝光光源光强2000�?000W，输出能量可�?/td></tr><tr><td>光束范围</td><td>14.25�?#215; 14.25′�/td></tr><tr><td>均匀光束范围</td><td>13.25�?#215; 13.25′�/td></tr><tr><td>光束均匀�?/td><td>�?%�?%</td></tr><tr><td>365nm输出光束强度</td><td>5KW 25�?0mW/cm<sup>2</sup>�? KW 15�?0mW/cm<sup>2</sup></td></tr><tr><td>400nm输出光束强度</td><td>5KW 50�?00mW/cm<sup>2</sup>�? KW30�?0mW/cm<sup>2</sup></td></tr><tr><td>可调节曝光时闳�/td><td>0.1�?99.9s</td></tr><tr><td>范围观察</td><td>显微�?CCD相机安装�?80�?000倍可变放大，1600倍可选）</td></tr><tr><td>电动观察范围移动</td><td>显微镜x、y、z电动操作（手柄控制）</td></tr><tr><td>电动样品�?/td><td>样品台x、y、z、Theta电动操作</td></tr><tr><td>卡盘移动</td><td>大范围。静态对准工具模块进行x、y、z、Theta移动</td></tr><tr><td>卡盘水平</td><td>楔形误差补偿（楔形位置自动感应，压力传感器，警报（�/td></tr><tr><td>基片尺寸</td><td>直至14�?#215; 14′�/td></tr><tr><td>掩模板规栻�/td><td>可替换的直至15�?#215; 15′�/td></tr><tr><td>真空卡盘移动</td><td>x、y�?0mm；Theta�?��</td></tr><tr><td>Z向移动距禺�/td><td>10mm</td></tr><tr><td>接触模式</td><td>接近式、软接触式、硬接触式、真空接触式（真空接触力可调节）</td></tr><tr><td>接近调节</td><td>1��m步进可调节程序化控制系统</td></tr><tr><td>对准精度</td><td>1��m</td></tr><tr><td>显示�?/td><td>17″触屎�/td></tr><tr><td>气动控制</td><td>基片、掩膜、接触、接触调节、卡盘锁、N<sub>2</sub>、N<sub>2</sub>调节</td></tr><tr><td>分辨玆�/td><td>1��m（真空接触下近紫外）</td></tr><tr><td>摆放</td><td>防震桋�/td></tr><tr><td>选件</td><td>CCD BSA、DUV、紫外强度计</td></tr></tbody></table><p>� Auto Exposure / Alignment System</p><p>� 2~6 inch wafer process</p><p>� Interface between Aligner and Robot : RS-232C</p><p>� Auto Loading and Unloading Using Double Robot Arm</p><p>� Auto-Alignment with Vision System</p><p>� Pre-Alignment and Automatic Positioning</p><p>� Anti-Vibration Table</p><p>� Dual CCD Auto zoom Microscope ? Variable Magnification : Max. 1400x</p><p>� 17inch LCD touch monitor</p><p>� Wedge Error Compensation</p><p>� Throughput :Alignment : 120WPH PSS� First layer : 170WPH</p><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><colgroup><col/><col/><col/></colgroup><tbody><tr><td></td><td> Item</td><td> Specification</td></tr><tr><td rowspan="5"> Exposure System</td><td> Lamp Power</td><td> 350W UV Lamp(OSRAM)</td></tr><tr><td> Resolution</td><td> 0.8um (Vacuum contact)</td></tr><tr><td> Beam Uniformity</td><td> � �� 5% (6inch standard)</td></tr><tr><td> Intensity</td><td> 20~25mW/cm2:350~450nm</td></tr><tr><td> Adjustable Exposure Time</td><td> 0.1 to 999.9 sec</td></tr><tr><td rowspan="7"> Alignment System</td><td> Alignment Accuracy</td><td> 1um</td></tr><tr><td> Alignment Gap</td><td> 20 to 200um</td></tr><tr><td> Pre-Alignment Accuracy</td><td> �� 50um</td></tr><tr><td rowspan="2"> Process Mode</td><td> Vacuum� Hard� Soft Contact and Proximity</td></tr><tr><td> *Proximity Gap is 20um to 200um</td></tr><tr><td> Proximity Adjustment</td><td> adjustable 1 micron increments Program Control System</td></tr><tr><td> Throughput</td><td>>120 wafer/hour (Auto alignment) 170 wafer/hour (PSS� First layer)</td></tr><tr><td rowspan="2"> Sample</td><td> Substrate</td><td> 2 ~ 6 inch</td></tr><tr><td> Mask Size</td><td> 3 ~ 7 inch</td></tr><tr><td rowspan="5"> Utilities</td><td> Vacuum</td><td> > 650mmHg</td></tr><tr><td> CDA</td><td> > 6Kg/cm2</td></tr><tr><td> N2</td><td> > 4Kg/cm2</td></tr><tr><td> Electricity</td><td> 220V� 30A� 1Phase</td></tr><tr><td> Monitor</td><td> Touch LCD 17" Monitor</td></tr></tbody></table> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); $(".xgfa_box").eq(_index).css("display","block"); }); }); </script>  <div class="xgzl"> <div class="cxd_tit"><span></span>相关资料</div> <div class="xgzl_box"><div style="padding:10px;">暂无数据、�/div> </div> </div>  <div class="yhpl"> <div class="cxd_tit"><span></span>用户评论</div> <form id="FormComments" action="" method="post" onsubmit="return false"> <input name="SaveProComments" id="SaveProComments" type="hidden" value="yes" /> <input name="ProductID" id="ProductID" type="hidden" value="279086" /> <input name="ProQuality" id="ProQuality" type="hidden" value="10" /> <input name="ProService" id="ProService" type="hidden" value="10" /> <input name="ProUsability" id="ProUsability" type="hidden" value="10" /> <input name="ProCostperformance" id="ProCostperformance" type="hidden" value="10" /> <div class="yhpl_pf"> <div> <p>产品质量</p> <div><span id="Quality" class="stars star10"></span><span id="Quality_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>售后服务</p> <div><span id="Service" class="stars star10"></span><span id="Service_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>易用�?/p> <div><span id="Usability" class="stars star10"></span><span id="Usability_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>性价毓�/p> <div><span id="Costperformance" class="stars star10"></span><span id="Costperformance_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> </div> <div class="yhpl_pftit">评论内容</div> <textarea name="Comments" id="ProComments" onfocus="checklogin();" placeholder="分享产品使用经验/采购评价（不超过500字）">