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General Description
TheLoadstationThe FurnacePC-MUX ControllerGas Source CabinetScavengerRobotics/Automation
Thermco5000 Series?5000series was developed for 150mm wafer processing?Up to1016 mm flat zone (5200 model)?Typically4 tubes per stack?Normallyconfigured for semi-automatic loadingThermco8000 Series?8000Series isThermco’slargest furnace system?Developedfor 200mm wafers?Usedin PV production for 156x156mm cells?Up to5 tubes in one stack?Canbe configured for full automation?Up to1100 mm flat zone (8200 model)
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