耀他科技晶圆测厚�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p>晶圆测厚� MX203-4-21是一款手动载片的晶圆几何特性量测仪,适用于直径分别为 50 mm�?5 mm� 100 mm的硅片。该设备专为</p><p>控制晶圆厚度与形状而设�?同时可选配应力评估功能以满足更全面的检测需求、�/p><p></p><p>晶圆测厚� MX203-4-21与所有其� E+H 晶圆几何量测仪器一�?采用� E+H 的非接触式电容式距离传感器技术。每片晶圆的纯测量时�?长为 5 �?在操作员进行手动装载与卸载的情况�?完成一个完整的晶圆测量流程大约需� 20 秒、�/p><p>The Wafer Geometry Station晶圆几何特性测量工作站晶圆几何测量站由一个下探针头和一个上探针头构成。每个探针头均以一块平板为基础,该平板中径向排列嵌入� 21 个非接触式电容距离传感器。两块传感器板呈水平安装,并以面对面的方式精确对齐。通过用参考晶圆进行简单的校准,即可获得每对传感器之间的距离、�/p><p style="text-align: center;"></p><p>Measurement Principle 测量原理</p><p>厚度Thicknes和翘曲度Bow/Warp测量在一个周期内完成。在测量过程�?晶圆自由地放置在下探针头内部安装的支撑点上。对顶部传感器至晶圆正面的距�?以及底部传感器至晶圆背面的距离进行测量、�/p><p>晶圆厚度由每对传感器之间己知距离减去所测得的顶部与底部距离之和计算得出。此�?翘曲测量还额外利用了底部传感器测得的距离数据。在整个测量过程�?晶圆始终保持静止状�?从而确保了测量结果的高度重复性和精确性、�/p><p>Measurement type 测量类别</p><p>Thickness 晶圆厚度</p><p>Flatness (TTV) 平整�?总厚度变匕�/p><p>Bow 李曲</p><p>Warp 翘曲</p><p>Stress 应力(选配)</p><p></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; 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