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眉山天乐半导?英寸SiC衬底片产品标凅br style="box-sizing: border-box;"/>4-inch SiC Substrate Specification | |||||
序号 Item |
等级 Grade |
精选级(Z级) Zero MPD Grade |
工业级(P级) Production Grade |
测试级(D级) Dummy Grade |
|
1.晶体参数 Boule Parameters | |||||
1.1 | 晶型 Polytype | 4H-N | |||
1.2 | 表面晶向偏离 Surface orientation error | Off axis?.0°toward <11-20>±0.5°,On axis:<0001>±0.5° | |||
2.电学参数 Electrical Parameters | |||||
2.1 | 掺杂 Dopant | Nitrogen | |||
2.2 | 电阻 Resistivity | 0.015-0.028Ω·cm | |||
3.机械参数 Mechanical Parameters | |||||
3.1 | 直径 Diameter | 99.5mm-100.0mm | |||
3.2 | 厚度 Thickness | 350μm±15μm | 350μm±25μm | ||
500μm±15μm | 500μm±25μm | ||||
3.3 | 主定位边方向 Primary Flat Orientation |
{10-10}±5° | |||
3.4 | 主定位边长度 Primary Flat Length | 32.5mm±2.0mm | |||
3.5 | 局部平整度 LTV | ?.5μm | ?.5μm | ?μm | |
3.6 | 总厚度变 TTV | ?μm | ?μm | ?5μm | |
3.7 | 弯曲?* BOW | ?5μm | ?5μm | ?0μm | |
3.8 | 翘区 Warp | ?5μm | ?5μm | ?0μm | |
3.9 | 正面(硅面)粗糙?AFM)Front (Si-face) Roughness | Ra?nm | |||
4.结构 Structure | |||||
4.1 | 微管密度 Micropipe density | ?.1cm-2 | ?.2cm-2 | ?5cm-2 | |
4.3 | 螺位 TSD | ?00cm-2 | ?00cm-2 | ?000cm-2 | |
4.4 | 基平面位 BPD | ?00cm-2 | ?00cm-2 | / | |
4.5 | 刃位 TED | ?000cm-2 | ?000cm-2 | / | |
5.正面质量 Front Quality | |||||
5.1 | 表面处理 Surface finish | CMP | |||
5.2 | 颗粒 Particle | ||||
5.3 | 划痕 Scratches | None | |||
5.4 | 缺口/崩边/裂纹/疵点/沾污 Edge chips/indents/cracks/stains/contamination | None | |||
5.5 | 多晶 Polytype areas | None | None | Cumulative area ?% | |
5.6 | 正面激光标 Front marking | / | |||
6.背面质量 Back Quality | |||||
6.1 | 背面处理 Back finish | CMP | |||
6.2 | 背面划痕 Scaratches | None | None | Cumulative length ?x wafer diameter | |
6.3 | 背面缺口/崩边 Back defects edge chip/indents | None | |||
6.4 | 背面粗糙 Back roughness | Ra?.2 mm | Ra?.2 mm | Ra?.5 mm | |
6.5 | 背面激光标 Back marking | 距离边缘1mm ( from top edge) | |||
7.边缘轮廓 Edge | |||||
7.1 | 边缘轮廓 Edge exclusion | 3 mm | |||
8.包装 Packaging | |||||
8.1 | 激光标 Laser Marking(carbon side) | Carbon face | |||
8.2 | 包装 Packaging | 单片?5片包裄/td> | |||
Notes: None means no request. |
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