自动晶圆减薄�?参数-价格-中国粉体罐�/title>

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font-family: "microsoft yahei", Arial, Helvetica, STHeiTi, sans-serif; font-size: 14px; text-wrap-mode: wrap; background-color: rgba(0, 0, 0, 0.05);"><span style="box-sizing: border-box; font-size: medium;"><span style="box-sizing: border-box; font-weight: 700;">设备介绍</span></span></p><p style="box-sizing: border-box; margin-top: 0px; margin-bottom: 0px; padding: 0px; color: rgb(102, 102, 102); font-family: "microsoft yahei", Arial, Helvetica, STHeiTi, sans-serif; font-size: 14px; text-wrap-mode: wrap; background-color: rgba(0, 0, 0, 0.05);">单轴单工位的结构设计</p><p style="box-sizing: border-box; margin-top: 0px; margin-bottom: 0px; padding: 0px; color: rgb(102, 102, 102); font-family: "microsoft yahei", Arial, Helvetica, STHeiTi, sans-serif; font-size: 14px; text-wrap-mode: wrap; background-color: rgba(0, 0, 0, 0.05);">可适用大部分的晶圆加工要求，兼顾整面磨削和留边磨削</p><p style="box-sizing: border-box; margin-top: 0px; margin-bottom: 0px; padding: 0px; color: rgb(102, 102, 102); font-family: "microsoft yahei", Arial, Helvetica, STHeiTi, sans-serif; font-size: 14px; text-wrap-mode: wrap; background-color: rgba(0, 0, 0, 0.05);"><br/></p><p style="box-sizing: border-box; margin-top: 0px; margin-bottom: 0px; padding: 0px; color: rgb(102, 102, 102); font-family: "microsoft yahei", Arial, Helvetica, STHeiTi, sans-serif; font-size: 14px; text-wrap-mode: wrap; background-color: rgba(0, 0, 0, 0.05);"><br/></p><p style="box-sizing: border-box; margin-top: 0px; margin-bottom: 0px; padding: 0px; color: rgb(102, 102, 102); font-family: "microsoft yahei", Arial, Helvetica, STHeiTi, sans-serif; font-size: 14px; text-wrap-mode: wrap; background-color: rgba(0, 0, 0, 0.05);"><br/></p><h2 style="box-sizing: border-box;font-family: 'microsoft yahei', Arial, Helvetica, STHeiTi, sans-serif;line-height: 28px;color: rgb(51, 51, 51);margin: 0px 0px 30px;font-size: 2.2rem;padding: 0px 0px 25px;border-bottom: 1px solid rgba(0, 0, 0, 0.2);text-wrap-mode: wrap;background-color: rgba(0, 0, 0, 0.05)">产品详情</h2><p><section style="box-sizing: border-box;font-size: 1.6rem;line-height: 28px;color: rgb(102, 102, 102);font-family: 'microsoft yahei', Arial, Helvetica, STHeiTi, sans-serif;text-wrap-mode: wrap;background-color: rgba(0, 0, 0, 0.05)"><p style="box-sizing: border-box;margin-top: 0px;margin-bottom: 0px;padding: 0px;text-align: center"><span style="box-sizing: border-box;font-size: medium"><span style="box-sizing: border-box;font-weight: 700">主要参数</span></span></p><p style="box-sizing: border-box;margin-top: 0px;margin-bottom: 0px;padding: 0px"><br/></p><table class="table table-bordered" width="990" style="width: 668px;"><tbody style="box-sizing: border-box"><tr style="box-sizing: border-box;vertical-align: middle !important" class="firstRow"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center"><span style="box-sizing: border-box;font-weight: 700">规格</span></p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center"><span style="box-sizing: border-box;font-weight: 700">单位</span></p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center"><span style="box-sizing: border-box;font-weight: 700">技术指栆�/span></p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">工件直径</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">mm</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">Ø150 / Ø300</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">磨削方式</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><br/></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">整面磨削 / 留边磨削</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">金刚石砂轮（兼容DISCO砂轮（�/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">mm</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">Ø300</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">砂轮轴数野�/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><br/></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">1</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">砂轮轴功玆�/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">kW</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">7.5</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">砂轮轴转逞�/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">r/min</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">1000~4000</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">Z轴行稊�/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">mm</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">120</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">Z轴磨削进给速度</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">mm/s</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">0.0001~0.08</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">Z�?小进给量</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">µm</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">0.1</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">硅片厚度测量范围</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">µm</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">0~1800</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">厚度测量分辨玆�/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">µm</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">0.1</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">夹持方式</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><br/></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">多孔真空吸盘</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">工件轴数野�/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><br/></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">1</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">工件轴转逞�/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">r/min</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">10~300</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">磨削后TTV</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">µm</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">1.5</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">磨削后片间厚度偏�?/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">µm</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">±3</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">精磨后表面粗糙度</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">Ra</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">10nm</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">外形尺寸（W × D × H（�/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">mm</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">850×1760×1900</p></td></tr><tr style="box-sizing: border-box;vertical-align: middle !important"><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">整机净里�/p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">kg</p></td><td style="box-sizing: border-box;padding: 8px;vertical-align: top;line-height: 1.42857"><p style="box-sizing: border-box;text-align: center">2200</p></td></tr></tbody></table></section></p><p><br/></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 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