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} }); function showliuyan(me, showtype){ if(showtype==0){ //$("#Content").val($("#Content").attr('placeholder')); Content= document.getElementById('PopMsgFrom').Content.getAttribute('placeholder'); document.getElementById('PopMsgFrom').Content.value=Content; } if(showtype==1){ // $("#Content").val($(me).text()); alert($(me).text()); document.getElementById('PopMsgFrom').Content.value=$(me).text(); } $(".fxp").css("display","flex"); } function close_popwin(){ $(".fxp").css("display","none"); // 关闭虚拟电话后的留言� $(".dhxj").css("display","none"); $(".dhxjbox").css("display", "none"); $(".dhxjbox2").css("display", "none"); return false; } </script>  <div class="cpjs"> <div class="cpjs_tab"> <div class="js_cpjj" style="border-bottom: 3px solid #1479d7; color: #1479d7;">产品介绍</div> <div class="js_cxd">创新炸�/div> <div class="js_xgfa">相关方案</div> <div class="js_xgzl">相关资料</div> <div class="js_yhpl">用户评论</div> <div class="js_gsdt">公司动�?/div> <div class="js_wsj">问商宵�/div> </div> <script> $(function(){ // 切换 $(".cpjs_tab a").click(function(){ $(".cpjs_tab a").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p>FLATSCAN 薄膜应力测试仪用于对各种反射�?如硅片、镜面、X射线�?Goebel-mirrors)、金属表面或抛光聚合�?的平整度、表面曲率、平均半径和薄膜应力(晶圆应力)进行非接触式测量。光学测量原理确保了高精度。其基于对垂直入射激光来沿具有恒定步长的线的反射角进行测量。从测量点之间反射角的变化可以精确计算出表面轮廓。对于某些应�?反射角本�?表面斜率)也很重要。因�?软件还提供了这种测量选项、�/p><p>在半导体技术的应用�?可通过测量镀膜前后晶圆的曲率半径来计算涂层的薄膜应力(晶圆应力)、�/p><p>测量区域�?/p><p>所用测量原理的一个特点是它与测量区域无关。因�?200mm 的标准测量场直径几乎可以任意增加,而不会降低精�?/p><p>测量精度髗�/p><p>FLATSCAN 薄膜应力测试仪具有高测量精度的特点。测量系统的分辨率可� 0.1arcsec。表面形状的再现性优� 100 nm、�/p><p>测量范围和工作距离大</p><p>测量范围是指在一次扫描中能够测量�?*矢高(�?小可测曲率半�?。FLATSCAN 的一大特点是测量范围极其宽广,这是其他竞争测量方法(如条纹干涉仪或相移干涉仪)所无法实现的、�/p><p>因此,FLATSCAN 薄膜应力测试仪适用于测量具有强曲率的表�?例如aoebe! 镜、砗片或其他类似的表面。所采用的光学测量原理不受工作距离的影响,并确保了较高的工作距�?因此不会对样本造成损坏的危险、�/p><p>可选的2D/3D测量</p><p>根据设备类型,可选择进行单线扫描或完整的 3D 扫描�?D 扫描由众多单线扫描自动组合而成,具有自动样本定位功能。该软件提供了所有先进的图形和数值表示测量结果的常用功能,例如 3D 表征、剖面图和测量报�?</p><p>用于计算薄膜应力的软件模坖�/p><p>该软件配备了一个基于Fowkes 理论计算薄膜应力的模�?适用于半导体技术以及所有涉及表面改�?如涂层或去除涂层)的应�?能够快速、轻松地测量薄膜应力。薄膜应力是根据镀膜过程前后平均曲率半径计算得出的、�/p><p>主要技术参�?/p><p>1、激光束非接触式测量</p><p>2、具有自动测量晶圆的轮廓、曲率和薄膜应力的功胼�/p><p>3、表面曲率的重复�?P-V)�?00nm</p><p>4、光学测量系统的分辨玆�0.1arcsec</p><p>5、光学测量系统的精度:1arcsec</p><p>6、扫描速度:10~30mm/s</p><p>7、可测量范围:标准(p200mm�?00mm,更大可定刵�/p><p><br/></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; 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