山东力冠微电子装备有限公号/div>
首页 > 产品中心 > 半导体行业专用仪 > 晶体提拉设备
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晶体提拉设备
产品简今/div>

产品概述/Product Introduction9/span>

直拉法晶体生长专用设备,可实现在高压、真空和保护气氛下直拉生长晶佒/p>

Special equipment for Czochralski crystal growth, which can realize Czochralski crystal growth under high pressure, vacuum and protective atmosphere

采用自动称重结构,在保证晶体品质的前提下实现了直拉晶体的自动生长过程

Adopting automatic weighing structure, the automatic growth process of Czochralski crystal is realized on the premise of ensuring crystal quality

产品特点/Product Characteristics9/span>

高精度的传感器和控制软件

High precision sensor and control software

自动控制晶体外形

Automatic control of crystal shape

**温度:2400ℂ/p>

Maximum temperature: 2400ℂ/p>

晶体尺寸:2-8英寸

crystal size: 2-8 inches

应用范围/Scope9/span>

应用于氧化家(Ga₂O?单晶生长,SiC单晶、激光单晶生镾/p>

Applied to Gallium Oxide(Ga₂O?Single Crystal Growth, SiC Single Crystal Growth and Laser SingleCrystal Growth


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