稳健性工业设计（Robust Design）和经过实践证明的高可靠性轴承系统、/span>
紧凑型结构以满足更小的物理空间安装需求、/span>
高气流量和高抽速、/span>
可任意角度安装、/span>
防护等级IP54符合工业环境应用要求、/span>
可应用于腐蚀性气体工况、/span>
SEMI S2 UL认证、/span>
完整的配件系统扩展了潜在客户的需求、/span>
更长时间维护保养时间、/span>
可现场更换轴承、/span>
Bearing 轴承 |
Ball bearing 球轴找/span> |
Compression ratio for Ar 氩气压缩 |
2.5 107 |
Compression ratio for H2 氢气压缩毓/span> |
3 102 |
Compression ratio for He 氦气压缩毓/span> |
3 103 |
Compression ratio for N2 氮其压缩毓/span> |
3 106 |
Cooling method standard 冷却方式，标凅/span> |
Convection 对流 |
Electronic drive unit 控制?/span> |
with TC 110 |
Flange (in) 法兰＇span>进气（/span> |
DN 25 |
Flange (out) 法兰（出气） |
DN 16 ISO-KF / G 1/8" |
Fore-vacuum max. for N2 氮气**前级真空 |
25 hPa|18.75 Torr|25 mbar |
Gas throughput at full rotational speed for Ar 氩气全转速时的气流量 |
0.37 hPa l/s|0.28 Torr l/s|0.37 mbar l/s |
Gas throughput at full rotational speed for H2 氢气全转速时的气流量 |
2.78 hPa l/s|2.08 Torr l/s|2.78 mbar l/s |
Gas throughput at full rotational speed for He 氦气全转速时的气流量 |
0.48 hPa l/s|0.36 Torr l/s|0.48 mbar l/s |
Gas throughput at full rotational speed for N2 氮气全转速时的气流量 |
0.37 hPa l/s|0.28 Torr l/s|0.37 mbar l/s |
Interfaces 接口 |
RS-485 Remote |
Mounting orientation 安装方向 |
in any orientation 任意方向 |
Operating voltage 运行电压 |
24 ( 5 %) V DC |
Particulate matter 颗粒?/span> |
yes |
Permissible magnetic field max. 容许?*磁场 |
3 mT |
Protection category 防腐等级 |
IP 54 |
Pumping speed for Ar 氩气抽逞/span> |
11.5 l/s |
Pumping speed for H2 氢气抽逞/span> |
3.7 l/s |
Pumping speed for He 氦气抽逞/span> |
6 l/s |
Pumping speed for N2 氮气抽逞/span> |
10 l/s |
Rotation speed 2 % 旋转速度 2 % |
90000 min-1 |
Rotation speed variable 可变旋转速度 |
50-100 % |
Run-up time 启动时间 |
0.9 min |
Sound pressure level 声压?/span> |
< 50 dB (A) |
Ultimate pressure according to PNEUROP 根据PNEUROP的极限压劚/span> |
< 5 10-5hPa|< 3.75 10-5Torr|< 5 10-5mbar |
Weight 重量 |
1.8 kg|3.97 lb |
Pfeiffer vacuum涡轮分子 Hipace10尺寸
Pfeiffer vacuum涡轮分子泵Hipace10抽逞/strong>
