稳健性工业设计（Robust Design）和经过实践证明的高可靠性轴承系统、/span>
紧凑型结构以满足更小的物理空间安装需求、/span>
高气流量和高抽速、/span>
可任意角度安装、/span>
防护等级IP54符合工业环境应用要求、/span>
可应用于腐蚀性气体工况、/span>
SEMI S2 UL认证、/span>
完整的配件系统扩展了潜在客户的需求、/span>
更长时间维护保养时间、/span>
可现场更换轴承、/span>
| Bearing 轴承 |
Hybrid |
| Compression ratio for Ar 氩气压缩 |
> 1 1011 |
| Compression ratio for H2 氢气压缩毓/span> |
1.4 105 |
| Compression ratio for He 氦气压缩毓/span> |
1.3 107 |
| Compression ratio for N2 氮其压缩毓/span> |
> 1 1011 |
| Cooling method optional 冷却方式，选择?/span> |
Air/water |
| Cooling method standard 冷却方式，标凅/span> |
Convection |
| Cooling water consumption 冷却水耗量 |
75 l/h |
| Cooling water temperature 冷却水温?/span> |
5-25 C|41-77 F|278-298 K |
| Electronic drive unit 控制?/span> |
with TC 110 |
| Flange (in) 法兰（进（/span> |
DN 63 ISO-K |
| Flange (out) 法兰（出（/span> |
DN 16 ISO-KF / G 1/4" |
| Fore-vacuum max. for N2 氮气**前级真空 |
22 hPa|16.5 Torr|22 mbar |
| Gas throughput at full rotational speed for Ar 氩气全转速时的气流量 |
0.54 hPa l/s|0.4 Torr l/s|0.54 mbar l/s |
| Gas throughput at full rotational speed for H2 氢气全转速时的气流量 |
15.3 hPa l/s|11.48 Torr l/s|15.3 mbar l/s |
| Gas throughput at full rotational speed for He 氦气全转速时的气流量 |
2.7 hPa l/s|2.02 Torr l/s|2.7 mbar l/s |
| Gas throughput at full rotational speed for N2 氮气全转速时的气流量 |
1.3 hPa l/s|0.98 Torr l/s|1.3 mbar l/s |
| Interfaces 接口 |
RS-485 Remote |
| Mounting orientation 安装方向 |
in any orientation |
| Operating voltage 运行电压 |
24 ( 5 %) V DC |
| Permissible magnetic field max. 容许?*磁场 |
3.3 mT |
| Protection category 防腐等级 |
IP 54 |
| Pumping speed for Ar 氩气抽逞/span> |
66 l/s |
| Pumping speed for H2 氢气抽逞/span> |
48 l/s |
| Pumping speed for He 氦气抽逞/span> |
58 l/s |
| Pumping speed for N2 氮气抽逞/span> |
67 l/s |
| Rotation speed 2 % 旋转速度 2 % |
90000 min-1 |
| Rotation speed variable 可变旋转速度 |
50-100 % |
| Run-up time 启动时间 |
1.7 min |
| Sound pressure level 声压?/span> |
48 dB (A) |
| Ultimate pressure according to PNEUROP 根据PNEUROP的极限压劚/span> |
< 1 10-7hPa|< 7.5 10-8Torr|< 1 10-7mbar |
| Venting connection 排气连接仵/span> |
G 1/8" |
| Weight 重量 |
2.4 kg|5.29 lb |
Pfeiffer vacuum涡轮分子 Hipace80尺寸
Pfeiffer vacuum涡轮分子泵Hipace80抽逞/strong>