German First-Nano System 德国韦氏纳米
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真空回流焉/strong>9/span>

Specifications

Process environment nitrogen inert gas formic acid forming gas
Maximum temperature 450C
Heating area 420 x 420 mm
Heating plate removable: graphite aluminum etc.
Clearance above heating plate 60 mm
Heat up / cool down ramp 250C/min
Control deviation +/- 0.5C
Heating elements 16x infrared heating lamps in two crossed rows
Heating control individual/adjustable on every heating lamp
Cooling of heating plate nitrogen flow
Temperature measurement up to 4x thermocouples K-Type freely positional
Pressure measurement full range over two gauges
Maximum vacuum 1x10-2 mbar (5x10-6 mbar with turbo pump)
Formic acid bubbler 40 ml container in front panel with auto refill
Cooling of chamber body water/ethylene glycol mixture
Lid viewing port 80 mm with shutter
Display 7" LCD with touch screen
PC Software process logging recipe transfer etc.
User interface remote control over relay I/Os
Dimensions see layout
Weight 280 kg
Power supply 3 phase country specific

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应用9/span>

在真空和惰性气体中加热、散热器上的功率半导体、倒装芯片回流焊、凸点熔化、高强度LED连接、密封封装密封、光伏电池组件、模具连接、印刷铜膜烧结、混合电路组件、扁平封装封装、微机电系统和光电器件封装,汽车传感器、高能电池等、/span>

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