移动?/p>
工商已核宝/p>
留言询价
抑制微粒粉尘的选项
切割部二流体喷嘴、/span>
Spinner部二流体喷嘴、/span>
工作盘水帘来防止因微粒干燥所引起的硬化、/span>
强抽风管（主轴）、/span>
标配功能
自动刀痕校正（Auto Kerf Check）、/span>
非接触式刀高测量（NCS，Non-Contact Setup）、/span>
刀片断裂检测（Blade Broken Detector）、/span>
二流体喷嘴、/span>
规格 |
单位 |
TS861 |
|
(1.2/1.8/2.4Kw) |
|||
**工作范围 |
mm |
Φ200/Φ150 |
|
X-axis |
Cutting range |
mm |
210/160 |
Cutting speed |
mm/sec |
0.1-1,000 |
|
Y1、Y2-axis |
Cutting range |
mm |
210 |
Index step |
mm |
0.0001 |
|
Index positioning accuracy |
mm |
0.003/210 |
|
mm |
0.002/5(Single error) |
||
Z-axis |
Max. stroke |
mm |
14.2(Forφ2”blade) |
Moving resolution |
mm |
0.0000003(24bit) |
|
Repeatability accuracy |
mm |
0.001 |
|
ϴ-axis |
Max. rotating angle |
deg |
380 |
Spindle |
Rated torque |
N．m |
0.27 |
Revolution speed range |
rpm |
6,000-60,000 |
|
Machine dimensions (W x D x H) |
mm |
1,250 x 1,600 x 1,890 |
|
Machine weight |
kg |
2,000 |
|
全自动双轴晶圆切?TS861的工作原理介绍？
