技术参数：

Candela CS1 SPECIFICATIONS

Substrate

Sizes: 2 in. � 200 mm diameter*

*Other sizes may be available on request

Thickness: 350 ��m � 1�?00 ��m

Material: Any opaque� polished surface which scatters

� 10% of incident light

Any clear� polished substrate which scatters � 10% of incident light

Defect Sensitivity

0.3 ��m diameter PSL sphere equivalent � 95% capture rate

(PSL on bare Si)

Other Defects and Applications

Defect Types: Particles� scratches� stains� pits� and bumps.

Classification accuracy and minimum

detectable sizes depend on optical

signatures of defects.

Sensitivity: Minimum detectable size for automatic

defect classification:

- Scratches: 100 ��m long� 0.1 ��m wide�

50 ? deep

- Pits: 20 ��m diameter� 50 ? deep

- Stains: 20 ��m diameter� 10 ? thick

Note: Defect signal must be more than 3x background P-V signal