卷对卷柔性薄膜沉积设夆/span>
Cassette houses flexible material
卷筒用于装载柔性衬底材斘/p>
Cassette transported from one process chamber to another via a robotic handler
制备薄膜时，卷筒可由真空机器手从一个腔室输送至另一个腔宣/p>
Advantages 此沉积系统的优点
- Eliminates cross-contamination 在制备多层膜器件时消除了交互掺杂影响
- Flexibility to adjust parameters on any part of the process. 制备薄膜时，能灵活控制各种运转沉积参?/p>
- Down time reduced i.e. each chamber can be serviced independently 因每个腔室可单独维护，减少了停机非运转时闳/p>
Reel to Reel Cassette Cluster tools
Cluster tool w/ 8 port locations
具有8个腔室的团簇型沉积系绞/p>
15cm and 30cm webwidth
柔性衬底的宽度可从15cm?0cm
Computer controlled
可完全由电脑程序控制操作运行
PECVD HWCVD and Sputter capability
制备方式包括等离子体和热丝化学气相沉积，及溅尃/p>
(US patent #6?58?08B1)
（本产品获美?*#6?58?08B1（/p>
