研博智创等离子增强化学气相沉积实验系�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p><span style="white-space-collapse: preserve; background-color: rgb(255, 255, 255); font-family: arial, helvetica, sans-serif; font-size: 16px; color: rgb(0, 0, 0);">等离子增强化学气相沉积实验系� 极限真空：≤6.67x10-5 Pa (经烘烤除气后)� 频率�?nbsp;13.56MHz� 控制方式：手动逻辑控制� 气路系统�?路进气及不锈钢管路、截止阀等； 设备主要用途： 该系列设备应用等离子体化学气相沉积技术，主要用来制作SiO2、Si3N4、非晶Si：H、多晶Si、SiC、W、Ti-Si、GaAs、GaSb等介电及金属膜。等离子增强化学气相沉积可以较大幅度地降低沉积反应的温度，使其在热稳定性差的基底表面上进行沉积成为可能。反应温度的降低还可以有效抑制器件制作过程中的层间扩散。沉积温度的降低，还可以降低热应力失配� 设备的主要技术参�?</span></p><p><span style="color: rgb(90, 90, 90); font-family: Arial, 宋体, Helvetica, sans-serif, Verdana; font-size: 12px; white-space-collapse: preserve; background-color: rgb(255, 255, 255);"></span></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); 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